000 02478cam a22003137a 4500
001 vtls000003263
003 VRT
005 20250102224919.0
008 081220s2005 enka f|b 101 0 eng
020 _a1852339411 (hbk.)
024 3 _a9781852339418 (hbk.)
039 9 _a201402040116
_bVLOAD
_c201010091142
_dmalmash
_c200812201347
_dNoora
_y200812201343
_zNoora
050 0 0 _aTK7874
_b.E75 2003
111 2 _aEuromat 2003
_d(2003 :
_cLausanne, Switzerland)
_949447
245 1 0 _aMaterials for information technology :
_bdevices, interconnects and packaging /
_cEhrenfried Zschech, Caroline Whelan and Thomas Mikolajick (eds.).
260 _aLondon :
_bSpringer,
_cc2005.
300 _axix, 508 p. :
_bill. ;
_c24 cm.
440 0 _aEngineering materials and processes
_949448
500 _aSelected conference papers.
504 _aIncludes bibliographical references and index.
505 _aAdvanced materials characterization Thin film desposition Material aspects of non-volatile memories Materials for interconnects Materials for assembly/packaging
520 _aThe fast-developing information technology industry is driving a need for new materials in order to facilitate the development of more reliable microelectronic products. Materials for Information Technology is an up-to-date overview of current developments and R&D activities in the field of materials used for information technology with a focus on future applications. This title includes: materials for silicon-based semiconductor devices (including high-k gate dielectric materials); materials for nonvolatile memories; materials for on-chip interconnects and interlayer dielectrics (including silicides, barrier materials, low-k and ultra low-k dielectric materials); and, materials for assembly and packaging. The latest results in materials science and engineering as well as applications in the semiconductor industry are covered including the synthesis of blanket and patterned thin film materials, their properties, constitution, structure and microstructure. Computer modelling and analytical techniques to characterise thin film structures are also included to give a comprehensive survey of materials for the IT industry.
650 0 _aMicroelectronics
_xMaterials
_vCongresses.
_949449
650 0 _aInformation technology
_vCongresses.
_949450
700 1 _aZschech, Ehrenfried.
_949451
700 1 _aWhelan, Caroline.
_949452
700 1 _aMikolajick, Thomas.
_949453
942 _2lcc
_n0
_cBK
999 _c23434
_d23434