| 000 | 01189cam a22002654a 4500 | ||
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| 001 | vtls000011263 | ||
| 003 | VRT | ||
| 005 | 20250102224322.0 | ||
| 008 | 120911s2005 nyua |bf 001 0 eng | ||
| 020 | _a0071445595 | ||
| 039 | 9 |
_a201402040221 _bVLOAD _c201209111019 _dlaila _y201209111018 _zlaila |
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| 050 | 0 | 0 |
_aTK7871.85 _b.S42935 2005 |
| 245 | 0 | 0 |
_aSemiconductor manufacturing handbook / _cHwaiyu Geng, editor in chief. |
| 260 |
_aNew York : _bMcGraw-Hill, _cc2005. |
||
| 300 |
_a1 v. (various pagings) : _bill. ; _c25 cm. |
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| 490 | 0 | _aMcGraw-Hill handbooks | |
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction _vHandbooks, manuals, etc. _939557 |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction _vHandbooks, manuals, etc. _939558 |
|
| 700 | 1 |
_aGeng, Hwaiyu. _939559 |
|
| 856 | 4 | 2 |
_3Contributor biographical information _uhttp://www.loc.gov/catdir/enhancements/fy0624/2005045580-b.html |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0624/2005045580-d.html |
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0624/2005045580-t.html |
| 942 |
_2lcc _n0 _cBK |
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| 999 |
_c17895 _d17895 |
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