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| 008 | 090328s2007 nyua |b 001 0 eng d | ||
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_aJackson, Mark J. _932440 |
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_aMicro and nanomanufacturing / _cMark J. Jackson. |
| 260 |
_aNew York : _bSpringer, _cc2007. |
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| 300 |
_ax, 699 p. : _bill. ; _c24 cm. |
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| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aMicrofabrication. _932441 |
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| 650 | 0 |
_aNanotechnology. _92813 |
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