000			02674cam a22003014a 4500
001			vtls000003649
003			VRT
005			20250102223537.0
008			081227s2002 nyua |b 001 0 eng
010			_a2001-026003
020			_a0471333727 (cloth : alk. paper)
039		9	_a201402040119 _bVLOAD _c201006121037 _dmalmash _c200812271328 _dvenkatrajand _y200812271324 _zvenkatrajand
050	0	0	_aTK7871.85 _b.S9883 2002
082	0	0	_a621.3815/2 _221
100	1		_aSze, S. M., _d1936- _925527
245	1	0	_aSemiconductor Devices, Physics and Technology / _cS.M. Sze.
250			_a2nd ed.
260			_aNew York : _bWiley, _cc2002.
300			_aviii, 564 p. : _bill. (some col.) ; _c26 cm.
504			_aIncludes bibliographical references and index.
505			_aPreface; Introduction; PART I: SEMICONDUCTOR PHYSICS; Energy Bands and Carrier Concentration in Thermal Equilibrium; Carrier Transport Phenomena; PART II: SEMICONDUCTOR DEVICES; p-n Junction; Bipolar Transistor and Related Devices; MOSFET and Related Devices; MESFET and Related Devices; Microwave Diodes, Quantum-Effect, and Hot-Electron Devices; Photonic Devices; PART III: SEMICONDUCTOR TECHNOLOGY; Crystal Growth and Epitaxy; Film Formation; Lithography and Etching; Impurity Doping; Integrated Devices; Appendix A: List of Symbols; Appendix B: International Systems of Units (SI Units); Appendix C: Unit Prefixes; Appendix D: Greek Alphabet; Appendix E: Physical Constants; Appendix F: Properties of Important Element and Binary Compound Semiconductors at 300 K; Appendix G: Properties of Si and GaAs at 300 K; Appendix H: Derivation of the Density of States in Semiconductor; Appendix I: Derivation of Recombination Rate for Indirect Recombination; Appendix J: Calculation of the Transmission Coefficient for a Symmetric Resonant-Tunneling Diode; Appendix K: Basic Kinetic Theory of Gases; Appendix L: Answers to Selected Problems; Index
520			_aThis book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices.
650		0	_aSemiconductors. _92379
856			_3Contributor biographical information _uhttp://www.loc.gov/catdir/bios/wiley042/2001026003.html
856			_3Publisher description _uhttp://www.loc.gov/catdir/description/wiley034/2001026003.html
856			_3Table of contents _uhttp://www.loc.gov/catdir/toc/onix05/2001026003.html
942			_2lcc _n0 _cBK
999			_c10573 _d10573