TY  - BOOK
AU  - Geng,Hwaiyu
TI  - Semiconductor manufacturing handbook
T2  - McGraw-Hill handbooks
SN  - 0071445595
AV  - TK7871.85 .S42935 2005
PY  - 2005///
CY  - New York
PB  - McGraw-Hill
KW  - Semiconductors
KW  - Design and construction
KW  - Handbooks, manuals, etc
KW  - Integrated circuits
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0624/2005045580-b.html
UR  - http://www.loc.gov/catdir/enhancements/fy0624/2005045580-d.html
UR  - http://www.loc.gov/catdir/enhancements/fy0624/2005045580-t.html
ER  -