TY  - BOOK
AU  - Jackson,Mark J.
TI  - Micro and nanomanufacturing
SN  - 9780387258744 (hd.bd.)
AV  - TK7836 .J33 2007
U1  - 620/.5 22
PY  - 2007///
CY  - New York
PB  - Springer
KW  - Microfabrication
KW  - Nanotechnology
N1  - Includes bibliographical references and index
ER  -