Jackson, Mark J. <br/><br/>
Micro and nanomanufacturing / 
Mark J. Jackson. 
 - New York :  Springer,  c2007. 
 - x, 699 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9780387258744 (hd.bd.) 0387258744 (hd.bd.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microfabrication.<br/>Nanotechnology.
<br/><br/><label>LC Class. No.: </label>TK7836  / .J33 2007 
<br/><br/><label>Dewey Class. No.: </label>620/.5