Micro and nanomanufacturing /
Jackson, Mark J.
Micro and nanomanufacturing / Mark J. Jackson. - New York : Springer, c2007. - x, 699 p. : ill. ; 24 cm.
Includes bibliographical references and index.
9780387258744 (hd.bd.) 0387258744 (hd.bd.)
Microfabrication.
Nanotechnology.
TK7836 / .J33 2007
620/.5
Micro and nanomanufacturing / Mark J. Jackson. - New York : Springer, c2007. - x, 699 p. : ill. ; 24 cm.
Includes bibliographical references and index.
9780387258744 (hd.bd.) 0387258744 (hd.bd.)
Microfabrication.
Nanotechnology.
TK7836 / .J33 2007
620/.5